The design and fabrication of a magnetically actuated micromachined flow valve

doi:10.1016/0924-4247(90)80047-9

Sensors and Actuators A: Physical

Volume 24, Issue 1, May 1990, Pages 47-53

https://doi.org/10.1016/0924-4247(90)80047-9 Get rights and content

Abstract

In this paper, a magnetically actuated valve, manufactured by silicon and thin-film micromachining, is considered. An analysis of the magnetic circuit is made to determine the critical design parameters, and a fabrication sequence is described. An integrated array of these microvalves, when combined with chemical microsensors, is intended to form the basis of an automated flow distribution and chemical analysis system. The feasibility of magnetic actuation, an addressing scheme, and the fabrication process are discussed.

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: Based on a paper presented at the 5th International Conference on Solid-State Sensors and Actuators (Transducers '89), Montreux, Switzerland, June 25–30, 1989.

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The design and fabrication of a magnetically actuated micromachined flow valve

Abstract

Sensors and Actuators

Sensors and Actuators

Sensors and Actuators

A thermopneumatic actuation principle for a microminiature pump and other micromechanical devices

Sensors and Actuators

The fabrication of integrated mass flow controllers

Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan

A microminiature electric-to-fluidic valve

Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan