Novel intramolecularly stabilized organogallium and organoindium compounds and their use in MOVPE

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Abstract

Novel organogallium and organoindium compounds containing the intramolecularly stabilizing dimethylaminopropyl, diethylaminopropyl or dimethylaminobutyl ligand have been synthesized for use in MOVPE. Syntheses and NMR investigations of the moderately air-stable compounds are reported. Using those compounds, GaAs and InP semiconductor layers of good quality could be grown in initial experiments.

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