Measurement of Debye-Waller factors in Co₃Ti by quantitative CBED

The Debye-Waller factors (DWFs) of Co and Ti atoms in Co₃Ti have been obtained by quantitative convergent-beam electron diffraction (QCBED). They are B_Co = 0.20-0.24 and B_Ti = 0.41-0.43 Å² in Co₃Ti at room temperature. A modified simulated-annealing algorithm and its parallel algorithm were employed to obtain reliable results efficiently.