Abstract
The manufacturing of pinhole arrays with diameters 10 μm up to 60 μm in 100–300 μm gold foils is described using LIGA. These structures are used to characterize the electron beam in a storage ring by means of the emitted synchrotron radiation. The source inside the bending magnet 13 at BESSY I (single bunch mode, 70 mA ring current, pinholes: ∅60 μm) is (448±40) μm in height and (768±40)μm in horizontal width. For BESSY II pinholes with ∅ 10–20 μm will be used utilizing bending magnet radiation (resolution ∼10 μm), single pinholes with 1–5 μm in diameter are dedicated to insertion device characterization (coherence).
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Received: 25 August 1997/Accepted: 23 October 1997
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Gerner, M., Holldack, K., Lüttge, R. et al. Manufacturing pinhole arrays for X-ray source diagnostics using LIGA. Microsystem Technologies 4, 184–186 (1998). https://doi.org/10.1007/s005420050127
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DOI: https://doi.org/10.1007/s005420050127