LIGA technology in BSRF

Abstract

 Beijing Synchrotron Radiation Facility is a partly dedicated Synchrotron Radiation Source which is operated since the end of 1990. Some main specifications of the source are briefly illustrated. Beam line 3B1 is a soft X-ray beam line extracted from bending magnet exploited for lithography. In the end of 3B1 there is a simple exposure chamber, LIGA patterns were exposured in the chamber. The LIGA technologies in BSRF are in the basic research stage, only a few of demonstrated patterns of deep etching structure were obtained. A sample of electroplating apparatus has been set up for getting metal structure. Further plan of the next phase of LIGA technology are presented. A new exposure scanner is being designed and would be set up on the another beam line 4W1 which is extracted from wiggle source with critical wavelength 2.2 A which seems quite suitable for deep etching exposure.