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Self-organized structuring of W/C multilayers on Si substrate

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Abstract.

After aging at room temperature for several months W/C multilayers (20 periods, single layer thicknesses in the nanometer range) grown on Si-(111) substrates by pulsed laser deposition (PLD) developed homogeneously wrinkled surfaces. Their structures were studied by optical microscopy, atomic force microscopy and X-ray diffractometry. Typical dimensions of debonded areas are some 100 μm in length, about 40 μm in width and 2–3 μm in height. The formation of wrinkles is accompanied by an increase in the free surface by 1–2%. Stress relaxation is considered the driving force of this phenomenon.

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Authors and Affiliations

  1. Institut für Kristallographie und Festkörperphysik, Fachrichtung Physik der Technischen Universität, D-01062 Dresden, Germany, , , , , , DE

    D.C. Meyer, A. Klingner & P. Paufler

  2. Fraunhofer-Institut für Werkstoff- und Strahltechnik, Winterbergstrasse 28, D-01277 Dresden, Germany, , , , , , DE

    Th. Holz

Authors
  1. D.C. Meyer
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  2. A. Klingner
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  3. Th. Holz
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  4. P. Paufler
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Received: 26 July 1999 / Accepted: 29 July 1999 / Published online: 16 September 1999

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Meyer, D., Klingner, A., Holz, T. et al. Self-organized structuring of W/C multilayers on Si substrate. Appl Phys A 69, 657–659 (1999). https://doi.org/10.1007/s003390051049

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  • DOI: https://doi.org/10.1007/s003390051049

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