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Transient reflecting grating for sub-surface analysis: GHz ultrasonic and thermal spectroscopies and imaging

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Abstract

Picosecond time-resolved Transient Reflecting Grating (TRG) measurements are demonstrated for GHz ultrasonic and thermal spectroscopies of thin films and sub-surface regions of sub-μm scale. The measurements should be tools for electrochemical interface monitoring and time-resolved imaging. Some results are presented to show ion-implantation-induced surface hardening and unusual heat-diffusion behavior near a silicon surface. A model describing potential dependence of TRG responses at an electrochemical interface is proposed. An image of photoexcited carrier density is compared with a thermal image for a He-ion-implanted silicon wafer to demonstrate the time-resolved imaging.

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Authors and Affiliations

  1. Department of Applied Chemistry, Faculty of Engineering, University of Tokyo, 7-3-1 Bunkyo-ku, Hongo, 113, Tokyo, Japan

    T. Sawada & A. Harata

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  1. T. Sawada
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  2. A. Harata
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Sawada, T., Harata, A. Transient reflecting grating for sub-surface analysis: GHz ultrasonic and thermal spectroscopies and imaging. Appl. Phys. A 61, 263–268 (1995). https://doi.org/10.1007/BF01538191

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  • DOI: https://doi.org/10.1007/BF01538191

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