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Investigation of UV-laser induced metallization: Platinum from Pt (PF3)4

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Abstract

We have measured the Pt deposition yields on various substrate materials from Pt(PF3)4 in the case where a KrF laser irradiates the solid surface. The data imply that an ample amount of electrons is produced by the laser surface interaction and dissociative electron capture initiates the metal deposition. The metal atom release is completed by a concerted surface reaction at a reduced energy demand. This is evidenced by thermochemical considerations. A simple criterion is derived to estimate the attainable spatial resolution. Sudden melting and evaporation beyond a certain layer thickness interferes with the deposition process. This is in accord to a model given, based on a poor thermal contact at the platinum substrate interface. The results may help to optimize uv laser induced metal deposition with respect to purity, adherence and structure.

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Authors and Affiliations

  1. Max-Planck-Institut für Quantenoptik, D-8046, Garching, Fed. Rep. Germany

    H. Schröder & K. L. Kompa

  2. Laboratorio Corrosione e Chimica delle Alte Temperature ENEA, Casaecia (Roma), Italy

    D. Masci

  3. CISE, 1-20090, Segrate (Milano), Italy

    I. Gianinoni

Authors
  1. H. Schröder
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  2. K. L. Kompa
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  3. D. Masci
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  4. I. Gianinoni
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Schröder, H., Kompa, K.L., Masci, D. et al. Investigation of UV-laser induced metallization: Platinum from Pt (PF3)4 . Appl. Phys. A 38, 227–233 (1985). https://doi.org/10.1007/BF00616501

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