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A search for a thermal spike effect in sputtering

II. Temperature dependence of the yield for heavy atomic and molecular ion bombardment

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Abstract

The temperature dependence of the sputtering yield was measured for lOOkeV per atom bombardment of silver with molecular and atomic antimony ions. No exponential increase of the yield was found in the temperature range from 25° to 775 °C, although a pronounced nonlinear effect is observed when the yield of these projectiles is compared,Y(Sb +2 )≈ 1.5×[2Y(Sb+)]. We conclude that there is no influence of the lattice temperature on collision spikes.

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Authors and Affiliations

  1. Institut für Grenzflächenforschung und Vakuumphysik, Kernforschungsanlage Jülich, D-5170, Jülich, Fed. Rep. Germany

    W. O. Hofer & K. Besocke

  2. Institut für Festkörperforschung, Kernforschungsanlage Jülich, D-5170, Jülich, Fed. Rep. Germany

    B. Stritzker

Authors
  1. W. O. Hofer
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  2. K. Besocke
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  3. B. Stritzker
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EURATOM Association

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Hofer, W.O., Besocke, K. & Stritzker, B. A search for a thermal spike effect in sputtering. Appl. Phys. A 30, 83–86 (1983). https://doi.org/10.1007/BF00614908

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  • DOI: https://doi.org/10.1007/BF00614908

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