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Copolymers of camphorsulfonyloxymaleimide and t-BOC protected vinyllactams for applications as single-component resists

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Summary

N-(10-Camphorsulfonyloxy)maleimide (CSOMI) have been copolymerized with two t-BOC protected vinyllactams, 3-(t- butoxycarbonyl)-1-vinyl-2-pyrrolidinone (BCVP) and 3-(t-butoxycarbonyl)-1-vinylcaprolactam (BCVC) to make photoacid-generating polymers P(CSOMI/BCVP) and P(CSOMI/BCVC), respectively. The thermal and photoacidolytic deprotection of the t- BOC protected copolymers readily underwent by UV exposure and solubilities of the polymers were remarkably changed thereafter. The polymers were proved to have the capability of a single-component, chemically amplified resist system in the deep-UV region without addition of any photoacid generator, because the polymers themselves photochemically generate a bulky 10-camphorsulfonic acid (SCA). The polymer films gave positive tone images by irradiation with electron beam (EB) and development with aqueous base solutions.

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Authors and Affiliations

  1. Department of Advanced Materials Engineering, Korea Advanced Institute of Science and Technology, Cheongryang, P. O. Box 201, 130-650, Seoul, Korea

    Jin -Baek Kim & Min -Ho Jung

  2. Functional Polymer Laboratory, Korea Institute of Science and Technology, 39-1, Hawolkok-dong, 130-791, Seoul, Korea

    Sang -Tae Kim & Kwang -Duk Ahn

Authors
  1. Sang -Tae Kim
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  2. Jin -Baek Kim
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  3. Min -Ho Jung
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  4. Kwang -Duk Ahn
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Kim, S.T., Kim, J.B., Jung, M.H. et al. Copolymers of camphorsulfonyloxymaleimide and t-BOC protected vinyllactams for applications as single-component resists. Polymer Bulletin 39, 423–430 (1997). https://doi.org/10.1007/s002890050168

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  • DOI: https://doi.org/10.1007/s002890050168

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