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Si-containing copolymer of 2,3-epoxypropyl-1-methacrylate

Photoresist sensitivity and plasma-etching behaviour

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Summary

Poly-p-trimethylsilylphenylmethacrylate(75)-co-glycidylmethacrylate (25) containing aromatic bisazides exhibits uv sensitivity as a negative type photoresist. Sensitometric data have been evaluated. The pressure-dependant reactivity under the conditions of oxygen reactive ion etching was determined.

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References

  1. M. Morita, A. Tanaka and K. Onose, J. Vac. Sci. Technol. B4, 414 (1986); M. Toriumi, H. Shiraishi, T. Ueno, N. Hayashi, S. Nonogaki, F. Sato and K. Kadota, J. Electrochem. Soc. 134, 936

    Google Scholar 

  2. D. C. Hofer, R. D. Miller and C. G. Willson, Proc. of the Int. Soc. for Optical Engg. (Proc. SPIE) 469, 18, 108 (1984)

    Google Scholar 

  3. Y. Ohnishi, M. Suzuki, K. Saigo, Y. Saotome and H. Gokan, Proc. SPIE 539, 62 (1985)

    Google Scholar 

  4. L. Wigant, H. Pasch and H.-J. Lorkowski, J. Inf. Rec. Mat. 16, 15 (1988)

    Google Scholar 

  5. G. Reinisch, L. Wigant, W. Hiller and R. Schmolke, Angew. Makromol. Chemie in press

  6. Brit. Pat. 2 097 143 (G. N. Taylor, Western Electric Co.), cf. Chem. Abstr. 98, 170 380 (1983); G. N. Taylor and Th. M. Wolf, Proc. of the IUPAC 28th Macromol. Symposium Amherst/USA 1982, 411

  7. H. Rager and E. Bretschneider, Mh. f. Chem. 81, 970 (1950)

    Google Scholar 

  8. A. M. Hartney, Proc. SPIE 771, 353 (1987)

    Google Scholar 

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Authors and Affiliations

  1. Bereich Makromolekulare Verbindungen, Zentralinstitut für Organische Chemie, Rudower Chaussee-5, O-1199, Berlin, Federal Republic of Germany

    Gerhard Reinisch, Lothar Wigant & Rose Krüger

  2. Physikalisch-Technisches Institut, Helmholtzweg 4, O-6900, Jena, Federal Republic of Germany

    Michael Köhler

Authors
  1. Gerhard Reinisch
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  2. Lothar Wigant
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  3. Rose Krüger
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  4. Michael Köhler
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Reinisch, G., Wigant, L., Krüger, R. et al. Si-containing copolymer of 2,3-epoxypropyl-1-methacrylate. Polymer Bulletin 27, 565–569 (1992). https://doi.org/10.1007/BF00300605

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  • DOI: https://doi.org/10.1007/BF00300605

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