A new method of the determination of significant factors with factor analysis in AES

Abstract

An important step of the factor analysis method is the determination of the number of significant factors. Common techniques as Malinowski indicator function provide perhaps uncertain results in spectroscopic cases depending on signal to noise ratio, the overlap of spectra, sample misalignment and concentration of the factors. ¶A new method for the determination of the number of components in Auger depth profiling is established. The new method of correlation of abstract basic spectra (CABS) takes into consideration the influence of experimental error especially noise. Simulations were carried out, to prove the CABS method. The results are compared with those obtained by established methods. Auger depth profiles of SiC and Si₃N₄-layers on Si(111) were analyzed by means of the CABS method and Target Factor Analysis. Aspects of data pretreatment as filtering are discussed.