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EDX depth profiling by means of effective layers

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Abstract

A new approach is described for depth profiling in stratified multilayer samples by recording energy dependent characteristic x-ray EDX(E 0 ) curves in a scanning electron microscope. An effective layer technique replaces the x-ray excitation function of the heterogeneous target by an equivalent function of a homogeneous sample. First results of thickness determination are shown and compared to direct measurements of film thickness monitoring (FTM) and atomic force microscopy (AFM).

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Authors and Affiliations

  1. Fachbereich Physik, Universität Rostock, Universitätsplatz 3, D-18051 Rostock, Germany, , , , , , DE

    T. Barfels, J.-C. Kuhr & H.-J. Fitting

  2. Physics Department, Yangon University, Yangon, Myanmar, , , , , , BU

    Kyaw Myint

Authors
  1. Kyaw Myint
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  2. T. Barfels
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  3. J.-C. Kuhr
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  4. H.-J. Fitting
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Additional information

Received: 15 July 1997 / Revised: 15 January 1998 / Accepted: 23 January 1998

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Myint, K., Barfels, T., Kuhr, JC. et al. EDX depth profiling by means of effective layers. Fresenius J Anal Chem 361, 637–639 (1998). https://doi.org/10.1007/s002160050975

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  • DOI: https://doi.org/10.1007/s002160050975

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