Surface analysis of films and film systems produced by pulsed laser deposition

Abstract

Ceramic films and film systems (ZrO₂ films, ZrO₂/Ti multilayers, and BN films) are deposited by pulsed laser deposition (PLD) and analyzed using X-ray photoelectron (XPS), Auger electron (AES), and micro-Raman spectroscopies. The electron spectroscopies are used to determine the film stoichiometry, the nature of the bonding, and to specify contaminant species. The micro-Raman spectroscopy gives information on crystal structure, grain size, and mechanical stress within the films. In ZrO₂ films a stoichiometry is achieved with typically 5%, with only weak dependencies on processing variables. The only contaminants are a small amount of water from the ambient gas and a carbonaceous surface layer. Multilayers consisting of alternating ZrO₂ and Ti layers exhibit a TiC contamination within the Ti layers. Depending on the processing variables, BN films may be nearly stoichiometric or may have significant, even dominant contaminations throughout the film from elemental B, B₂O₃, and/or a boron-oxynitride species. The first component is due to the non-stoichiometric material removal from the target (N-depletion) at low laser fluences, as confirmed by XPS measurements on irradiated targets. The second and third arise from H₂O in the ambient, and exhibit a complex dependence on processing variables. Micro-Raman spectra show only amorphous or hexagonalphase BN. Depending on the position on the substrate relative to the laser-induced vapour/plasma plume, there may be a particle deposition or mechanical stress within the films, as evidenced from large shifts (up to 15 cm⁻¹) of the Raman spectral peaks.