Summary
Possibilities of the measurement of elemental maps and their digital processing are demonstrated. Hardware and software developments and some applications for various material problems are discusses.
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Oswald, S., Siegert, L. & Große, G. Application of the two-dimensional lateral microanalysis by SIMS and EPMA in materials research. Fresenius J Anal Chem 341, 180–183 (1991). https://doi.org/10.1007/BF00321544
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DOI: https://doi.org/10.1007/BF00321544