Abstract
The plasma treatment of vapors containing organometallic compounds (of Pd, Ni, Co, Sn, Au) and various alkenes has been used to prepare thin films, the composition and electrical resistivity of which could be varied over a wide range.
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Suhr, H., Etspüler, A., Feurer, E. et al. Plasma-deposited metal-containing polymer films. Plasma Chem Plasma Process 8, 9–17 (1988). https://doi.org/10.1007/BF01016927
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DOI: https://doi.org/10.1007/BF01016927