Abstract
This article reports on the development of a microcalorimeter for X-ray spectroscopy which uses a superconducting kinetic inductance thermometer. The monolithic construction combines the thermometer and all other components on a single substrate. These include a dc SQUID for measuring the thermometer output, and a micromachined “leg and panel” structure for low thermal conductance and capacitance. An all-niobium prototype has been fabricated, and its operation verified qualitatively above 4 K.
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References
S.H. Moseley, R.L. Kelley, R.J. Schoelkopf, A.E. Szymkowiak, D. McCammon, and J. Zhang, IEEE Trans. Nuc. Scie. 35, 1, 1988.
D.G. McDonald, Appl. Phys. Lett., 50, 775, 1987.
J.E. Sauvageau and D.G. McDonald, IEEE Trans. Magn. 25, 1331, 1989.
S.H. Moseley, J.C. Mather and D. McCammon, J. Appl. Phys. 56, 1257, 1984.
D.P. Osterman, R. Patt and R. Madhavrao, IEEE Trans. Magn. 3, 2860, 1993.
J. M. Jaycox and M. B. Ketchen, IEEE Trans. Magn. Vol. 17, 400, 1981.
C.D. Tesche and J. Clarke, J. Low Temp. Phys. 27, 301, 1977.
F.C. Wellstood, C. Urbina and J. Clarke, IEEE Trans. Magn. 25, 1001, 1989.
F.C. Wellstood, private communication.
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Osterman, D.P., Patt, R., Audley, D. et al. An X-ray microcalorimeter with kinetic inductance thermometer and dc SQUID read-out. J Low Temp Phys 93, 251–256 (1993). https://doi.org/10.1007/BF00693428
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DOI: https://doi.org/10.1007/BF00693428