Abstract
Epitaxial growth of AlAs-InAs short-period superlattices on (0 0 1) InP can lead to heterostructures exhibiting strong, quasi-periodic, lateral modulation of the alloy composition; transverse satellites arise in reciprocal space as a signature of the compositional modulation. Using an x-ray diffractometer equipped with a position-sensitive x-ray detector, we demonstrate reciprocal-space mapping of these satellites as an efficient, non-destructive means for detecting and characterizing the occurrence of compositional modulation. Systematic variations in the compositional modulation due to the structural design and the growth conditions of the short-period superlattice are characterized by routine mapping of the lateral satellites.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
K. C. Hsieh, J. N. Baillargeon and K. Y. Cheng, Appl. Phys. Lett. 57 (1990) 2244.
K. Y. Cheng, K. C. Hsieh and J. N. Baillargeon, ibid. 60 (1992) 2892.
J. Mirecki millunchick, R. D. Twesten, D. M. Follstaedt, S. R. Lee, E. D. Jones, Yong zhang, S. P. Ahrenkiel and A. Mascarenhas, ibid. 70 (1997) 1402.
R. D. Twesten, J. M. Millunchick, S. P. Ahrenkiel, Y. Zhang, S. R. Lee, D. M. Follstaedt, A. Mascarenhas and E. D. Jones, Mater. Res. Soc. Symp. Proc. 441 (1997) 187.
R. D. Twesten, D. M. Follstaedt, S. R. Lee, E. D. Jones, J. L. Reno, J. Mirecki millunchick, A. G. Norman, S. P. Ahrenkiel, and A. Mascarenhas (submitted).
A. C. Chen, A. M. Moy, L. J. Chou, K. C. Hsieh and K. Y. Cheng, Appl. Phys. Lett. 66 (1995) 2694.
S. T. Chou, K. Y. Cheng, L. J. Chou and K. C. Hsieh, J. Appl. Phys. 78 (1995) 6270.
A. G. Norman, S. P. Ahrenkiel, H. Moutinho, M. M. Al-jassim, A. Mascarenhas, J. Mirecki millunchick, S. R. Lee, R. D. Twesten, D. M. Follstaedt, J. L. Reno and E. D. Jones, Appl. Phys. Lett. 73 (1998) 1844.
S. P. Ahrenkiel, A. G. Norman, M. M. Al-jassim, A. Mascarenhas, J. Mirecki millunchick, R. D. Twesten, S. R. Lee, D. M. Follstaedt and E. D. Jones, J. Appl. Phys. 84 (1998) 6088.
Yong zhang and A. Mascarenhas, Phys. Rev. B 57 (1998) 12245.
S. T. Chou, D. E. Wohlert, K. Y. Cheng and K. C. Hsieh, J. Appl. Phys. 83 (1998) 3469.
A. Mascarenhas, Y. Zhang, J. Mirecki millunchick, R. D. Twesten and E. D. Jones, AIP Conf. Proc. 404 (1997) 303.
P. J. Pearah, A. C. Chen, A. M. Moy, Kuang-chien hsieh and Keh-yung cheng, IEEE J. Quantum Electron. 30 (1994) 608.
J. W. Cahn, Acta Metall. 9 (1961) 795.
G. B. Stringfellow, J. Electron. Mater. 11 (1982) 903.
F. Glas, J. Appl. Phys. 62 (1987) 3201.
Idem., Phys. Rev. B 55 (1997) 11277.
J. E. Guyer and P. W. Voorhees, J. Cryst. Growth 187 (1998) 150.
I. P. I Patova, V. G. Malyshkin, A. A. Maradudin, V. A. Shchukin and R. F. Wallis, Phys. Rev. B 57 (1998) 12968.
J. Mirecki millunchick, R. D. Twesten, S. R. Lee, D. M. Follstaedt, E. D. Jones, S. P. Ahrenkiel, Y. Zhang, H. M. Cheong and A. Mascarenhas, MRS Bull. 22, No. 7 (1997) 38.
A. A. Darhuber, J. Stangl, V. Holy, G. Bauer, A. Krost, M. Grundmann, D. Bimberg, V. M. Ustinov, P. S. Kopev, A. O. Kosogov and P. Werner, Thin Solid Films 306 (1997) 198.
S. R. Lee, B. L. Doyle, T. J. Drummond, J. W. Medernach and R. P. SchneiderJR., in “Advances in xray Analysis, Vol. 38,” edited by P. Predecki et al. (Plenum Press, NY, 1995) p. 201.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Lee, S.R., Millunchick, J.M., Twesten, R.D. et al. Reciprocal-space analysis of compositional modulation in short-period superlattices using position-sensitive x-ray detection. Journal of Materials Science: Materials in Electronics 10, 191–197 (1999). https://doi.org/10.1023/A:1008991827724
Issue Date:
DOI: https://doi.org/10.1023/A:1008991827724