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Properties of Va metal-B films prepared by r.f.-sputtering

Part 2 Characterization and properties of the films in the system Nb-B

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Abstract

Nb100−x B x alloy films were prepared by the r.f.-sputtering method in the chemical composition range of 30 ≦x ≦ 76. Nb100−x B x (30 ≦x ≦ 54) films consisted of the amorphous state, and NbB2 crystal phase was observed on Nb100−xBx (67 ≦x ≦ 76) films. A remarkable preferred orientation with the (001) plane of NbB2 in parallel to the film surface was observed on Nb33B67 film. d.c. electrical conductivity of Nb100−xBx (30 ≦x ≦ 76) films decreased with increasing content of boron in the range from 7.3×103 to 7.6 ×102Ω−1cm−1. Micro-Vickers hardness of Nb100−x B x (30 ≦x ≦ 76) films exhibited the values of 1070 to 2060 kg mm2.

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References

  1. P. Schwaltkopf andR. Kieffer (in collaboration withW. Leszynski andF. Benesovsky), in “Refractory Hard Metal-Borides, Carbides, Nitrides, and Silicides” (Macmillan, New York, 1953) p. 271.

    Google Scholar 

  2. K. Oda, H. Yata, T. Yoshio, K. O-Oka andK. Oda,J. Mater. Sci. 21 (1986) 637.

    Article  CAS  Google Scholar 

  3. S. Iwasaki andY. Ouchi,IEEE Trans. Mag. MAG-14 (1978) 849.

    Article  CAS  Google Scholar 

  4. K. Ohji, T. Tohda, K. Wasa andS. Hayakawa,J. Appl. Phys. 47 (1976) 1726.

    Article  CAS  Google Scholar 

  5. A. J. Shuskus, T. M. Reeder andE. L. Paradis,Appl. Phys. Lett. 24 (1974) 155.

    Article  CAS  Google Scholar 

  6. M. Naoe, S. Hasunuma, Y. Hoshi andS. Yamanaka,IEEE Trans. Mag. MAG-17 (1981) 3184.

    Article  CAS  Google Scholar 

  7. R. Messier andR. Roy,J. Non-Cryst. Solids 28 (1978) 107.

    Article  CAS  Google Scholar 

  8. H. Nowotny, F. Benesovsky andR. Kieffer,Z. Metallkde. 50 (1959) 417.

    CAS  Google Scholar 

  9. A. F. Wells, in “Structural Inorganic Chemistry” (Clarendon Press, Oxford, 1975) p. 833.

    Google Scholar 

  10. B. Post, F. W. Glaser andD. Moskowitz,Acta Metall. 2 (1954) 20.

    Article  CAS  Google Scholar 

  11. JCPDS: International Centre for Diffraction Data, Powder Diffraction File; 16-1, 12-111.

  12. L. Brewer, D. L. Sawyer, D. H. Templeton andC. H. Dauben,J. Amer. Ceram. Soc. 34 (1951) 173.

    CAS  Google Scholar 

  13. JCPDS: International Centre for Diffraction Data, Powder Diffraction File; 12–99.

  14. R. Kiessling,Acta Chem. Scand. 3 (1949) 603.

    Article  CAS  Google Scholar 

  15. JCPDS: International Centre for Diffraction Data, Powder Diffraction File; 4–788.

  16. E. V. Clougherty andR. L. Pober,Nucl. Metall. 10 (1964) 423.

    CAS  Google Scholar 

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Author notes

  1. Hirohide Yata

    Present address: Central Research Laboratory of Ube Industries Ltd, Kogushi 1978-5, 755, Ube, Japan

Authors and Affiliations

  1. Research Institute for Non-Crystalline Materials, School of Engineering, Okayama University, 700, Okayama, Japan

    Kiichi Oda, Hirohide Yata, Tetsuo Yoshio & Kazuo O-Oka

  2. Department of Industrial Chemistry, Yonago Technical College, 683, Yonago, Japan

    Kohei Oda

Authors
  1. Kiichi Oda
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  2. Hirohide Yata
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  3. Tetsuo Yoshio
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  4. Kazuo O-Oka
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  5. Kohei Oda
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Oda, K., Yata, H., Yoshio, T. et al. Properties of Va metal-B films prepared by r.f.-sputtering. J Mater Sci 21, 3648–3652 (1986). https://doi.org/10.1007/BF02403015

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  • DOI: https://doi.org/10.1007/BF02403015

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