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Image processing of SEM micrographs of integrated circuits for defect location

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Journal of Materials Science Letters

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References

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Holt, D.B., Lesniak, M. & Luther, P. Image processing of SEM micrographs of integrated circuits for defect location. J Mater Sci Lett 2, 565–569 (1983). https://doi.org/10.1007/BF00719861

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  • DOI: https://doi.org/10.1007/BF00719861

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