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Deposition of TiO2 on heated substrates by the spray-inductively-coupled-plasma technique

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Journal of Materials Science Letters

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References

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Authors and Affiliations

  1. Institute for Materials Research, Tohoku University, 980, Sendai, Japan

    Y. Mizoguchi, M. Kagawa, Y. Syono & T. Hirai

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  1. Y. Mizoguchi
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  2. M. Kagawa
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  3. Y. Syono
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  4. T. Hirai
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Mizoguchi, Y., Kagawa, M., Syono, Y. et al. Deposition of TiO2 on heated substrates by the spray-inductively-coupled-plasma technique. J Mater Sci Lett 12, 1854–1855 (1993). https://doi.org/10.1007/BF00540009

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  • DOI: https://doi.org/10.1007/BF00540009

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