Skip to main content
Log in

Chemical vapour growth of HfC whiskers and their morphology

  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

HfC whiskers were prepared from a gas mixture of HfCl4 + CH4 + H2 + Ar in the presence of metal impurities, and the growth conditions and morphology were examined. The HfC whiskers preferentially grew at an H/Cl ratio of above 8, an HfCl4 gas flow rate of 10–20 standard cm3 min−1, a CH4 flow rate of 10–20 standard cm3 min−1, and at temperatures above 1050 °C. HfC whiskers, 60–170 μm long, with a ball-like tip and periodically varying diameters, were obtained at 1250 °C using a cobalt impurity.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. C. B. BARGERRON, R. C. BENSON, A. N. JETTE and T. E. PHILLIPS, J. Am. Ceram. Soc. 76 (1993) 1040.

    Article  Google Scholar 

  2. B. BAVARIAN and V. ARRIETA, in “Proceedings of the 35th International Society of Advanced Materials Process Engineers Symposium, Vol. 35 (1990) p. 1348.

  3. H. S. HU, A. JOSHI and J. S. LEE, J. Vac. Sci. Technol. A9 (1991) 1535.

    Article  Google Scholar 

  4. R. L. HEESTAND, ibid. 9 (1972) 1365.

    Article  CAS  Google Scholar 

  5. N. H. KRIKORIAN, T. C. WALLACE and J. L. ANDERSON, J. Electrochem. Soc. 110 (1963) 587.

    Article  CAS  Google Scholar 

  6. L. J. KECSKES, R. F., BENCK and P. H. NETHERWOOD Jr, J. Am. Ceram. Soc. 73 (1990) 383.

    Article  CAS  Google Scholar 

  7. N. H. KRIKORIAN, W. G. WITTERMAN and M. G. BOWMAN, J. Electrochem. Soc. 110 (1963) 560.

    Article  CAS  Google Scholar 

  8. H. KOBAYASHI, K. SHIMOSAKA, Y. KAMIYAMA and T. MITAMURA, J. Ceram. Soc. Jpn 101 (1993) 342.

    Article  CAS  Google Scholar 

  9. H. F. ACHE, J. GOSCHNICK, M. SOMMER, G. EMIG, G. SCHOCK and O. WORMER, Thin Solid Films 241 (1993) 356.

    Article  Google Scholar 

  10. I. YUITOU, M. FUTAMOTO and U. KAWABE, J. Jpn Inst. Metals 46 (1982) 737.

    Article  CAS  Google Scholar 

  11. H. LANG and D. SEYFERTH, Appl. Organometal. Chem. 4 (1990) 599.

    Article  CAS  Google Scholar 

  12. W. J. LACKEY, J. A. HANIGOFSKY and G. B. FREEMAN, J. Am. Ceram. Soc. 73 (1990) 1593.

    Article  CAS  Google Scholar 

  13. M. FUTAMOTO, I. YUITO and U. KAWABE, J. Cryst. Growth 61 (1983) 69.

    Article  CAS  Google Scholar 

  14. G. EMING, S. SCHOCH and O. WORMER, J. Phys. IV C3 (1993) 535.

    Google Scholar 

  15. R. S. WAGNER and W. C. ELLIS, Trans. Metall. Soc. AIME 233 (1965) 1053.

    CAS  Google Scholar 

  16. Idem, Appl. Phys. Lett. 4 (1964) 89.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Motojima, S., Kawashima, Y. Chemical vapour growth of HfC whiskers and their morphology. JOURNAL OF MATERIALS SCIENCE 31, 3697–3700 (1996). https://doi.org/10.1007/BF00352782

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00352782

Keywords

Navigation