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A microchip laser feedback interferometer with nanometer resolution and increased measurement speed based on phase meter

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Abstract

We introduce a new signal processing method based on phase meter into heterodyne microchip Nd:YAG laser feedback interferometer. The nanometer resolution and a higher measurement speed are realized. The factors determining the accuracy are analyzed. The displacements of the Physik Instrumente nanopositioning system and two piezoelectric transducers were measured. Experimental results indicate laser feedback interferometer’s ability of measuring nanoscale displacement and present promising application prospects in noncooperative targets measurement.

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Acknowledgments

This work is supported by the Major National Scientific Instrument and Equipment Development Project of China (Grant No. 2011YQ04013603).

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Authors and Affiliations

  1. State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China

    Song Zhang, Yidong Tan, Zhou Ren & Shulian Zhang

  2. School of Mechanical Engineering, Nantong University, Nantong, 226019, Jiangsu, China

    Yongqin Zhang

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  1. Song Zhang
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  2. Yidong Tan
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  3. Zhou Ren
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  4. Yongqin Zhang
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  5. Shulian Zhang
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Correspondence to Song Zhang.

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Zhang, S., Tan, Y., Ren, Z. et al. A microchip laser feedback interferometer with nanometer resolution and increased measurement speed based on phase meter. Appl. Phys. B 116, 609–616 (2014). https://doi.org/10.1007/s00340-013-5743-4

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  • DOI: https://doi.org/10.1007/s00340-013-5743-4

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