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Polymer surface patterning by laser scanning

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Abstract

Proposed work develops method of polymer surface patterning, suggested in our laboratory. Surface structures with different symmetry and shape are prepared on PMMA and photoresist (Su-8) surface. For surface modification, periodic laser scanning from confocal microscope was used. For optical response improvement meso tetraphenylporphyrine was added either in the polymer bulk or on the top of pristine polymer by vacuum evaporation method. Applications of vacuum deposition methods allow increasing applicability of the technique and preparation of more complex structure. Parameters of the created structures were studied with the aim to better understand the driving forces of the surface modification. Application of prepared structures in photonics as diffraction grating or light coupling elements is also given.

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Acknowledgments

This work was supported by the GA CR under the projects 108/11/P840, 108/11/P337, and 108/12/1168 and MPO CR under the project FR-TI3/797.

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Authors and Affiliations

  1. Department of Solid State Engineering, Institute of Chemical Technology, 166 28, Prague, Czech Republic

    O. Lyutakov, J. Tůma, I. Huttel, J. Siegel & V. Švorčík

  2. Department of Microelectronics, Faculty of Electrical Engineering, Czech Technical University, Prague, Czech Republic

    V. Prajzler

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  1. O. Lyutakov
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Correspondence to O. Lyutakov.

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Lyutakov, O., Tůma, J., Huttel, I. et al. Polymer surface patterning by laser scanning. Appl. Phys. B 110, 539–549 (2013). https://doi.org/10.1007/s00340-012-5291-3

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