Abstract
Vacuum chambers or vacuum components that are widespread in research and in industry must fulfill high degrees of cleanliness, especially if they are required for ultra-high-vacuum (UHV) applications. It is shown that common techniques that are used for manufacturing and testing of pressure containers and of related items are often not sufficient for UHV requirements. Outstanding vacuum chambers and components are described, which have been fabricated for actual research applications. The requirements for the design, manufacturing and performance of such systems will be displayed, providing support for adequate specification.
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PACS
07.30.Kf; 07.30.Hd
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Pink, F., Schmidt, G. Manufacturing and qualification of UHV chambers. Appl Phys A 78, 667–670 (2004). https://doi.org/10.1007/s00339-003-2278-2
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DOI: https://doi.org/10.1007/s00339-003-2278-2