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Flower-like aluminium nitride nanostructures deposited by rf magnetron sputtering on superhard rhodium boride films

  • T.C.: Dedicated to Maria Dinescu
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Abstract

In this work, we demonstrate the feasibility to obtain aluminium nitride (AlN) nanostructures by radio frequency magnetron sputtering technique. In particular, nanostructured flower-like morphologies are achieved through a direct growth of AlN films on superhard rhodium boride (RhB) layers deposited by means of pulsed laser deposition (PLD) technique. AlN is deposited at different substrate temperatures in the range 300–500 °C in order to investigate the effects on morphology and crystalline structure. The samples are characterized by field emission scanning electron microscopy, atomic force microscopy, X-ray diffraction analysis and photoluminescence measurements. Results reveal nanostructured flower-like morphology of AlN for samples grown at different temperatures, while the smoothing of flower-petals with the increasing of temperature is observed. X-ray diffraction analysis indicate that the (002) crystallographic texture of the samples decreased upon the increase of the deposition temperature and only for the sample deposited at 300 °C a strong c-axis orientation is obtained.

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Acknowledgements

The technical assistance of Mr. Marco Ortenzi and Mr. Luca Imperatori is gratefully acknowledged.

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Authors and Affiliations

  1. Institute for Microelectronics and Microsystems, National Research Council of Italy (IMM-CNR), Via del Fosso del Cavaliere 100, 00133, Rome, Italy

    F. Di Pietrantonio, M. Benetti & D. Cannatà

  2. Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM-CNR), Via del Fosso del Cavaliere 100, 00133, Rome, Italy

    M. Fosca & J. V. Rau

  3. Dipartimento di Ingegneria Industriale, Università di Roma “Tor Vergata”, Via del Politecnico 1, 00133, Rome, Italy

    C. Verona

  4. Dipartimento di Scienze, Università della Basilicata, Via dell’Ateneo Lucano 10, 85100, Potenza, Italy

    R. Teghil & A. De Bonis

Authors
  1. F. Di Pietrantonio
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  2. M. Fosca
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  3. M. Benetti
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  4. D. Cannatà
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  5. C. Verona
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  6. R. Teghil
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  8. J. V. Rau
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Correspondence to F. Di Pietrantonio or J. V. Rau.

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Di Pietrantonio, F., Fosca, M., Benetti, M. et al. Flower-like aluminium nitride nanostructures deposited by rf magnetron sputtering on superhard rhodium boride films. Appl. Phys. A 125, 681 (2019). https://doi.org/10.1007/s00339-019-2924-y

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  • DOI: https://doi.org/10.1007/s00339-019-2924-y

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