Abstract
Layers of ZnO nanoparticles with thicknesses of about 40 nm were prepared on Si substrates. It was shown that UV laser irradiation is suitable for consolidation and significant densification of the ZnO particle layers under ambient conditions. Both experiments and simulations show that an underlying SiO2 particle layer has a beneficial effect in inhibiting heat transfer towards the substrate and thus enables the application of temperature-sensitive carrier substrates like polymer foils despite the extremely high melting temperature of ZnO.
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References
K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, Nature 432, 488 (2004)
K.K. Banger, Y. Yamashita, K. Mori, R.L. Peterson, T. Leedham, J. Rickard, H. Sirringhaus, Nat. Mater. 10, 45 (2011)
M. Kim, M.G. Kanatzidis, A. Facchetti, T.J. Marks, Nat. Mater. 10, 382 (2011)
J.-S. Lee, M.V. Kovalenko, J. Huang, D.S. Chung, D.V. Talapin, Nat. Nanotechnol. 6, 348 (2011)
S. Walther, S. Schäfer, M.P.M. Jank, H. Thiem, W. Peukert, L. Frey, H. Ryssel, Microelectron. Eng. 87, 2312 (2010)
M. Baum, I. Alexeev, M. Schmidt, J. Laser Nano/Microeng. 6, 191 (2011)
Ü. Özgür, Ya.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, J. Appl. Phys. 98, 041301 (2005)
H. Pan, N. Misra, S.H. Ko, C.P. Grigoropoulos, N. Miller, E.E. Haller, O. Dubon, Appl. Phys. A 94, 111 (2009)
D. Lee, H. Pan, S.H. Ko, H.K. Park, E. Kim, C.P. Grigoropoulos, Appl. Phys. A (2012). doi:10.1007/s00339-012-6792-y
S. Walther, S. Polster, B. Meyer, M.P.M. Jank, H. Ryssel, L. Frey, J. Vac. Sci. Technol. B 29, 01A601 (2011)
Y.C. Liu, J.H. Hsieh, S.K. Tung, Thin Solid Films 510, 32 (2006)
E.N. Bunting, J. Am. Ceram. Soc. 13, 5 (1930)
M.N.R. Ashfold, F. Claeyssens, G.M. Fuge, S.J. Henley, Chem. Soc. Rev. 33, 23 (2004)
H.G. Hirschberg, Handbuch Verfahrenstechnik und Anlagenbau. Chemie, Technik und Wirtschaftlichkeit (Springer, Berlin, 1999), p. 300
O.V. Mazurin, M.V. Streltsina, T.P. Shvaiko-Shvaikovskaya, Handbook of Glass Data (Elsevier, Amsterdam, 1983), p. 55
G.A. Slack, C.J. Glassbrenner, Phys. Rev. 134, A1058 (1964)
VDI Gesellschaft, VDI-Wärmeatlas (Springer, Berlin, 2006)
Y.C. Liu, J.H. Hsieh, S.K. Tung, Thin Solid Films 510, 32 (2006)
E.D. Palik, Handbook of Optical Constants of Solids (Academic Press, New York, 1985), p. 555
C. Kittel, Einführung in die Festkörperphysik (Oldenbourg, München, 2005), p. 140
N. Soga, O.L. Anderson, J. Appl. Phys. 38, 2985 (1967)
R. Prasher, Phys. Rev. B 74, 165413 (2006)
Y. Kinemuchi, M. Mikami, K. Kobayashi, K. Watari, Y. Hotta, J. Electron. Mater. 39, 2059 (2010)
Acknowledgements
The support of the Deutsche Forschungsgemeinschaft (DFG, Graduiertenkolleg 1161/2) is gratefully acknowledged. Additionally, we are thankful for the support by Evonik Industries AG and also for the production of particle suspensions by Daniel Kilian. Furthermore, we want to thank Anke Haas for operating the electron microscope. Moreover, the authors gratefully acknowledge funding of the Erlangen Graduate School in Advanced Optical Technologies (SAOT) by the German Research Foundation (DFG) in the framework of the German excellence initiative.
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Baum, M., Polster, S., Jank, M.P.M. et al. Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget. Appl. Phys. A 107, 269–273 (2012). https://doi.org/10.1007/s00339-012-6871-0
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DOI: https://doi.org/10.1007/s00339-012-6871-0