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La2/3+yTiO3-δ perovskite (with δ≤0.5) were deposited by the laser ablation technique from Li0.33La0.56TiO3 targets. Their growth onto MgO substrateswas studied as a function of the oxygen pressure. For films grown in vacuum (10-6 mbar), a La0.63TiO2.5 composition was obtained, meaning that Ti3+ alone is present in the films, while Li ions are not incorporated under these conditions. This material shows good electric conductivity (ρ=500 mΩ cm). By contrast, insulating films with a Li0.1La0.70TiO3 composition corresponding to the Ti4+ species were obtained at high oxygen pressures (>0.05 mbar). For all conditions, textured films were grown with different orientations depending on the temperature and the oxygen pressure.
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Received: 10 September 1997/Accepted: 24 November 1997
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Morcrette, M., Gutiérrez-Llorente, A., Laurent, A. et al. Growth by laser ablation of Ti-based oxide films with different valency states . Appl Phys A 67, 425–428 (1998). https://doi.org/10.1007/s003390050798
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DOI: https://doi.org/10.1007/s003390050798