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Title:
Enhanced tunability of the composition in silicon oxynitride thin films by the reactive gas pulsing process
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Applied Surface Science [0169-4332] Aubry, Eric yr:2014
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Aubry, Eric
Weber, Sylvain
Billard, Alain
Martin, Nicolas
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Weber, Sylvain
Billard, Alain
Martin, Nicolas
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Weber, Sylvain
Billard, Alain
Martin, Nicolas
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