Language
English
German
^M
Dutch
Spanish
Title:
Effects of N2 and NH3 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics
Source:
Applied Surface Science [0169-4332] Park, K.-S. yr:2010
Basic
Sorry, no full text available...
Please use the document delivery service (see below)
Holding information
Holdings in library search engine
ALBERT
Document delivery
Request document via
Library/Bibliothek
Users interested in this article also expressed an interest in the following:
description
1.
Tan, S.
"Control of Interface Traps in HfO2 Gate Dielectric on Silicon."
Journal of Electronic Materials
2010. 2435-2440.
description
2.
Chen, Q.
"In situ X-ray photoelectron spectroscopy studies of HfO2 gate dielectric on SiC."
Thin solid films
518.24 (2010).
description
3.
Zou, K.
"Deposition of High-Quality HfO2 on Graphene and the Effect of Remote Oxide Phonon Scattering."
Physical review letters
105.12 (2010): 126601-.
description
4.
DaSilva, A.
"Mechanism for Current Saturation and Energy Dissipation in Graphene Transistors."
Physical review letters
104.23 (2010): 236601-236601.
description
5.
Pathak, S.
"Study of bulk Hafnium oxide (HfO2) under compression."
62ND DAE SOLID STATE PHYSICS SYMPOSIUM
2018. 30027-.
description
6.
Nahar, R.
"Improved thermal stability of nitrogen annealed sputtered hafnium oxide thin films for VLSI technology."
Microelectronics International
27.2 (2010): 93-97.
description
7.
Cheng, X.
"Structure and Dielectric Properties of HfO2 Thin Films."
wu ji cai liao xue bao
25.5 (2010): 468-472.
description
8.
Liao, L.
"Top-Gated Graphene Nanoribbon Transistors with Ultrathin High-k Dielectrics."
Nano letters
10.5 (2010): 1917-1921.
description
9.
Zhou, Y.
"Microstructuring of Graphene Oxide Nanosheets Using Direct Laser Writing."
Advanced materials
22.1 (2010): 67-71.
description
10.
Fratini, S.
"Substrate-limited electron dynamics in graphene."
Physical review. B, Condensed matter and materials physics
77.19 (2008): 195415-1.
Select All
Clear All
Save Citations
Select Format
ProCite
Reference Manager
EndNote
RefWorks
Submit citation export
Advanced
Author
Other articles by this author? -- in
GeoRef
author:
Park, K.-S.
Kim, D P
last name
initials
Other articles by this author? -- in
Online Contents Geosciences
author:
Park, K.-S.
Kim, D P
last name
initials
Other articles by this author? -- using
Web of Science
author:
Park, K.-S.
Kim, D P
last name
initials
Web Search
Find related information in
a Web Search Engine
Excite
Google
HotBot
Ixquick
ZOO
Ask
Yahoo!
Bing
Naver
Search Terms:
Search for related information in
Google Scholar
Article Title
Author Name
Journal Title
Other Search
Search Terms:
A service provided by the
Library of the Wissenschaftspark Albert Einstein
, Potsdam, Germany.
© 2005 SFX by Ex Libris Inc.