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High quality and low loss surface acoustic wave SAW resonator based on chromium-doped AlN on sapphire

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Abstract

This paper aims to investigate the performances of surface acoustic wave (SAW) resonators based on chromium-doped aluminum nitride (AlCrN) piezoelectric thin film on c-cut sapphire substrate. The electromechanical properties of AlCrN (mass density, elastic, dielectric and piezoelectric constants) are obtained from density functional theory calculations for different Cr-doping concentrations. Piezoelectricity is enhanced for Al1 − xCrxN with different x concentrations. Using finite element analysis, the electroacoustic parameters such as phase velocity, electromechanical coupling factor K2 of surface acoustic modes are determined for different AlCrN thickness-to-wavelength ratios and different Cr-doping concentrations. Higher order SAW modes arise at Cr concentration x = 25%. The electrical admittance and scattering parameter S21 for the fundamental SAW modes are determined. High K2, low loss and high-quality factor are found after incorporating Cr dopant. The comparison of the obtained results with the available numerical and experimental data on AlN doped with Scandium Sc has shown a considerable improvement of SAW devices characteristics, confirming that AlCrN can be adopted as a new piezoelectric material for high performances SAW devices.

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Acknowledgements

This work was supported by the General Directorate of Scientific Research and Technological Development DGRSDT of Algeria.

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Authors and Affiliations

  1. Research Center in Industrial Technologies CRTI, P.O. Box 64, 16014, Cheraga, Algiers, Algeria

    Farouk Laidoudi

  2. Research Unit in Optics and Photonics (UROP-CDTA), University of Setif, 1, El-Bez, 19000, Setif, Algeria

    Saad Amara, Fares Kanouni & Abdenacer Assali

  3. Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156, Rome, Italy

    Cinzia Caliendo

  4. Laboratory of Materials Physics, Faculty of Physics, University of Sciences and Technology - Houari Boumediene (U.S.T.H.B.), El-Alia, Po. Box 32, DZ-16111, Bab-Ezzouar, Algiers, Algeria

    Fouad Boubenider

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  1. Farouk Laidoudi
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Laidoudi, F., Amara, S., Caliendo, C. et al. High quality and low loss surface acoustic wave SAW resonator based on chromium-doped AlN on sapphire. Appl. Phys. A 127, 255 (2021). https://doi.org/10.1007/s00339-021-04395-y

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