Novel Design to Fabricate High Reflectivity GaN-Based Semiconductor/Air Distributed Bragg Reflector with the Tilt of Vertical Sidewall

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Copyright (c) 2002 The Japan Society of Applied Physics
, , Citation Hailong Wang et al 2002 Jpn. J. Appl. Phys. 41 L682 DOI 10.1143/JJAP.41.L682

1347-4065/41/6B/L682

Abstract

High reflectivity can be reached with the proper design of a GaN-based semiconductor/air distributed Bragg reflector (DBR) structure even with a large vertical sidewall tilt. Finite-difference time-domain simulations show that vertical sidewall tilt is a crucial concern for obtaining a high-reflectivity DBR in a conventional design. A tilt of only 3° reduces the reflectivity to ∼ 30%. Experimentally, it is difficult to etch vertical sidewalls of GaN-based materials. So, the novel design to obtain high reflectivity is important for the application of the GaN-based semiconductor/air DBR structure in waveguide lasers.

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10.1143/JJAP.41.L682