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Title: New Developments of Less Toxic Group-V Precursors for the Metalorganic Vapour Phase Epitaxy of III–V-Semiconductors: In -Situ-Formation of As–H Functions by Thermal β-Elimination of Specific As-Trialkyl Compounds
Source:

Japanese Journal of Applied Physics [0021-4922] Zimmermann, Gunnar yr:1996


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