Abstract
The atomic arrangements of ZnO single crystals have been investigated in detail using ion channeling methods. The ZnO crystals were grown by a flux method, and we focused on the channeling properties along the <0001> axis. In particular, to obtain information on O atoms in the crystal, a nuclear reaction induced by D+ ions was observed. As a result, it was revealed that the atomic arrangement of O atoms along the <0001> direction is better than that of Zn atoms in contrast with simple anticipation. This is quite remarkable but is regarded as one of the structural features of the crystal.