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Title:
Identification and elimination of inductively coupled plasma-induced defects in Al x Ga 1- x N/GaN heterostructures
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Chinese Physics B [1674-1056] Lin, Fang yr:2011
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Lin, Fang
Shen, Bo
Lu, Li-Wu
Liu, Xin-Yu
Wei, Ke
Xu, Fu-Jun
Wang, Yan
Ma, Nan
Huang, Jun
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author:
Lin, Fang
Shen, Bo
Lu, Li-Wu
Liu, Xin-Yu
Wei, Ke
Xu, Fu-Jun
Wang, Yan
Ma, Nan
Huang, Jun
last name
initials
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