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Title:
Variable RF capacitor based on a-Si:H (P-doped) multi-length cantilevers
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Journal of physics. Conference series [1742-6588] Fu, Y Q yr:2006
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author:
Fu, Y Q
Milne, S B
Luo, J K
Flewitt, A J
Wang, L
Miao, J M
Milne, W I
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author:
Fu, Y Q
Milne, S B
Luo, J K
Flewitt, A J
Wang, L
Miao, J M
Milne, W I
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initials
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