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Title:
Prospects for creating a laser nanolithography system for tasks of diffractive optics and nanophotonics
Source:
Journal of physics. Conference series [1742-6588] Korolkov, V P yr:2019
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author:
Korolkov, V P
Shimansky, RV
Khomutov, V N
Seduhin, A G
Nasyrov, R K
Kiryanov, V P
Kiryanov, A V
Zavyalova, M A
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author:
Korolkov, V P
Shimansky, RV
Khomutov, V N
Seduhin, A G
Nasyrov, R K
Kiryanov, V P
Kiryanov, A V
Zavyalova, M A
last name
initials
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