Time-of-Flight Measurements of Nonlinear Effects in Sputtering by Dimer Ions

D. J. Oostra, R. P. van Ingen, A. Haring, A. E. de Vries, and F. W. Saris
Phys. Rev. Lett. 61, 1392 – Published 19 September 1988
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Abstract

Time-of-flight distributions of sputtered Au atoms have been measured under 4 ke V I+ and 8 keV I2+ impact. The results show that a developing thermal spike contributes to the sputtering yield. It is higher under I2+ bombardment but the measured temperature obtained from Maxwell-Boltzmann fits is lower, suggesting a lower effective surface binding energy U0 for I2+ bombardment. A correlation between spike temperatures and U0 is discussed.

  • Received 9 November 1987

DOI:https://doi.org/10.1103/PhysRevLett.61.1392

©1988 American Physical Society

Authors & Affiliations

D. J. Oostra, R. P. van Ingen, A. Haring, A. E. de Vries, and F. W. Saris

  • FOM-Institute for Atomic and Molecular Physics, Kruislaan 407, 1098 SJ Amsterdam, The Netherlands

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Vol. 61, Iss. 12 — 19 September 1988

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