Title: |
Dislocation structure and microstrain evolution during spinodal decomposition of reactive magnetron sputtered heteroepixatial c-(Ti0.37,Al0.63)N/c-TiN films grown on MgO(001) and (111) substrates |
Source: |
Journal of Applied Physics
[0021-8979]
Calamba,
K M
yr:2019
|
|
|
|