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Title:
Uphill diffusion of ultralow-energy boron implants in preamorphized silicon and silicon-on-insulator
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Journal of Applied Physics [0021-8979] Ferri, M yr:2007
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Ferri, M
Solmi, S
Giubertoni, D
Bersani, M
Hamilton, J J
Kah, M
Kirkby, K
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Ferri, M
Solmi, S
Giubertoni, D
Bersani, M
Hamilton, J J
Kah, M
Kirkby, K
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Ferri, M
Solmi, S
Giubertoni, D
Bersani, M
Hamilton, J J
Kah, M
Kirkby, K
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