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Title:
High quality epitaxial CoSi2 using plasma nitridation-mediated epitaxy: The effects of the capping layer
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Journal of Applied Physics [0021-8979] Lee, Han-Bo-Ram yr:2007
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Lee, Han-Bo-Ram
Gu, Gil H
Son, J Y
Park, C G
Kim, Hyungjun
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Gu, Gil H
Son, J Y
Park, C G
Kim, Hyungjun
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Gu, Gil H
Son, J Y
Park, C G
Kim, Hyungjun
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