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Title:
A loss mechanism study of a very high Q silicon micromechanical oscillator
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Journal of Applied Physics [0021-8979] Liu, Xiao yr:2005
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author:
Liu, Xiao
Vignola, J F
Simpson, H J
Lemon, B R
Houston, B H
Photiadis, D M
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author:
Liu, Xiao
Vignola, J F
Simpson, H J
Lemon, B R
Houston, B H
Photiadis, D M
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initials
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author:
Liu, Xiao
Vignola, J F
Simpson, H J
Lemon, B R
Houston, B H
Photiadis, D M
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