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Title:
Monte Carlo simulation of depth and lateral profiles of boron atoms implanted in polycrystalline silicon
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Journal of Applied Physics [0021-8979] Shimizu, R yr:1977
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author:
Shimizu, R
Kang, S T
Koshikawa, T
Ogata, H
Kanayama, K
Ogata, Y
Akasaka, Y
Horie, K
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author:
Shimizu, R
Kang, S T
Koshikawa, T
Ogata, H
Kanayama, K
Ogata, Y
Akasaka, Y
Horie, K
last name
initials
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