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Title:
Anomalous diffusion of fluorine in silicon
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Applied Physics Letters [0003-6951] Jeng, S P yr:1992
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Jeng, S P
Ma, T P
Canteri, R
Anderle, M
Rubloff, G W
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Ma, T P
Canteri, R
Anderle, M
Rubloff, G W
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Ma, T P
Canteri, R
Anderle, M
Rubloff, G W
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