Abstract
A CVD process was developed for producing 63Ni-based atomic batteries by deposition of active 63Ni layers onto semiconductor silicon supports. Tetrakis(trifluorophosphine)nickel synthesized from 63Ni metal and phosphorus trifluoride was used as the volatile precursor. The influence of the support temperature and working pressure on the characteristics of the 63Ni coating was examined.
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Original Russian Text © I.D. Kharitonov, V.A. Mazgunova, V.A. Babain, A.I. Kostylev, A.O. Merkushkin, A.A. Shemukhin, Yu.V. Balakshin, A.V. Kozhemyako, S.N. Kalmykov, E.P. Magomedbekov, 2018, published in Radiokhimiya, 2018, Vol. 60, No. 2, pp. 143–147.
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Kharitonov, I.D., Mazgunova, V.A., Babain, V.A. et al. A CVD Process for Producing Atomic Current Sources Based on 63Ni. Radiochemistry 60, 158–163 (2018). https://doi.org/10.1134/S1066362218020054
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DOI: https://doi.org/10.1134/S1066362218020054