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Study of the generation of the 13.5-nm EUV radiation from Sn ions in a CO2 laser-produced plasma

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Abstract

Results are presented from experimental and theoretical studies of the efficiency of using a CO2 laser to create a high-power source of 13- to 14-nm EUV radiation for lithography. For a laser intensity of ∼2 × 1011 W/cm2, a conversion efficiency of k EUV ≃ 1.5% was achieved on a plane solid Sn target. The calculated gas dynamics and population kinetics of Sn plasma ions agree qualitatively with experimental results.

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Authors and Affiliations

  1. Troitsk Institute for Innovation and Fusion Research, Troitsk, Moscow oblast, 142192, Russia

    G. S. Volkov, V. I. Zaitsev, K. N. Makarov, A. P. Napartovich, V. K. Rerikh, Yu. B. Smakovskii, A. E. Stepanov & V. E. Cherkovets

  2. Lebedev Physical Institute, Russian Academy of Sciences, Leninskiĭ pr. 53, Moscow, 119991, Russia

    A. A. Rupasov

  3. Institute of Theoretical and Experimental Physics, Bol’shaya Cheremushkinskaya ul. 25, Moscow, 117218, Russia

    Yu. A. Satov

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  1. G. S. Volkov
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  2. V. I. Zaitsev
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  3. K. N. Makarov
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  4. A. P. Napartovich
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  5. V. K. Rerikh
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  6. Yu. B. Smakovskii
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  7. A. E. Stepanov
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  8. V. E. Cherkovets
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  9. A. A. Rupasov
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Additional information

Original Russian Text © G.S. Volkov, V.I. Zaitsev, K.N. Makarov, A.P. Napartovich, V.K. Rerikh, Yu.B. Smakovskii, A.E. Stepanov, V.E. Cherkovets, A.A. Rupasov, Yu.A. Satov, 2010, published in Fizika Plazmy, 2010, Vol. 36, No. 2, pp. 145–158.

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Volkov, G.S., Zaitsev, V.I., Makarov, K.N. et al. Study of the generation of the 13.5-nm EUV radiation from Sn ions in a CO2 laser-produced plasma. Plasma Phys. Rep. 36, 129–141 (2010). https://doi.org/10.1134/S1063780X10020042

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  • DOI: https://doi.org/10.1134/S1063780X10020042

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