Abstract
A new type of laser chemical vapour deposition process, in which the reactants are incorporated in the mist of the solvent, is proposed. It is applicable to prepare high-quality thin films from reactants having a low vapour pressure. By using a continuous wave CO2 laser, ZnS thin films, consisting of c-axis oriented ultrafine microcrystallites, have been prepared.
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Nosaka, Y., Tanaka, K., Fujii, N. et al. Preparation of ZnS thin films from solution mist by laser irradiation. J Mater Sci 29, 376–379 (1994). https://doi.org/10.1007/BF01162494
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DOI: https://doi.org/10.1007/BF01162494