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Synthesis of crystalline polyimide film by ionized cluster-beam deposition

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Abstract

Polyimide thin films were deposited by the ionized cluster-beam deposition technique. Imidization and crystallization of polyimide films were investigated using transmission electron microscopy and Fourier transform infrared spectroscopy. Polyimide films deposited under optimum conditions showed a maximum imidization and good crystal structure, which is superior to that of films fabricated by other techniques.

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Author notes

  1. S. J. Cho

    Present address: Department of Physics, Kyungsung University, 608-736, Pusan, Korea

Authors and Affiliations

  1. Department of Physics, Yonsei University, 120-749, Seoul, Korea

    K. W. Kim, S. C. Choi, S. S. Kim, S. J. Cho & C. N. Whang

  2. Department of Science Education, Kyungsang University, 660-901, Jinzu, Korea

    H. S. Choe

  3. Ceramics Division, Korea Institute of Science and Technology, 130-650, Seoul, Korea

    H. J. Jung, D. H. Lee & J. K. Lee

Authors
  1. K. W. Kim
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  2. S. C. Choi
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  3. S. S. Kim
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  4. S. J. Cho
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  5. C. N. Whang
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  6. H. S. Choe
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  7. H. J. Jung
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  8. D. H. Lee
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  9. J. K. Lee
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Kim, K.W., Choi, S.C., Kim, S.S. et al. Synthesis of crystalline polyimide film by ionized cluster-beam deposition. Journal of Materials Science 28, 1537–1541 (1993). https://doi.org/10.1007/BF00363345

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  • DOI: https://doi.org/10.1007/BF00363345

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