ExLibris header image
SFX Logo
Title: Effects of plasma power and deposition pressure on the properties of the low dielectric constant plasma polymerized cyclohexane thin films deposited by plasma enhanced chemical vapor deposition
Source:

Journal de Physique IV [1155-4339] Shim, C yr:2001


Collapse list of basic services Basic
Sorry, no full text available...
Please use the document delivery service (see below)  
Holding information
Holdings in library search engine ALBERT GO
Document delivery
Request document via Library/Bibliothek GO

Expand list of advanced services Advanced