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Title:
Characterization of a-SiCx:H thin films as an encapsulation material for integrated silicon based neural interface devices
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Thin Solid Films [0040-6090] Hsu, Jui-Mei yr:2007
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Hsu, Jui-Mei
Tathireddy, Prashant
Rieth, Loren
Normann, A R
Solzbacher, Florian
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Hsu, Jui-Mei
Tathireddy, Prashant
Rieth, Loren
Normann, A R
Solzbacher, Florian
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Hsu, Jui-Mei
Tathireddy, Prashant
Rieth, Loren
Normann, A R
Solzbacher, Florian
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